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Fabrication Technique of a 3-dimensional SU8 mold on PMMA substrate
H. Hamzah, Asrulnizam Abd. Manaf and O. Sidek. 2009. IEICE Electronics Express, Vol.6, No.24, 1726-1731. DOI: 10.1587/elex.6.1726
Collaborative Microelectronic Design Excellence Center, Universiti Sains Malaysia
Sains@USM, Level 1, Block C, No. 10 Persiaran Bukit Jambul, 11900 Bayan Lepas, Pulau Pinang, Malaysia
Tel: +604-6535611 | Fax: +604-6535635
Email: eeasrulnizam@usm.my
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